| 摘要 |
PROBLEM TO BE SOLVED: To provide measuring probe which never adversely affects measuring surface. SOLUTION: These method and system use the measuring probe (11) provided with housing (14) for holding at least one sensor element (17) in which its longitudinal shaft is in parallel with or above the longitudinal shaft (16) of the housing (14), to measure thickness of thin layer. At least in measuring process, gaseous media is supplied to feed aperture (21) of the measuring probe (11) on the measuring surface (28), supplied to one or more outlet aperture (26) made on edge (29) of the measuring probe (11) facing the measuring surface (28) through at least one vent line (24), and at least one mass flow of the gaseous media flowing out from the one or more outlet aperture (26) faces the measuring surface (28). Thus the measuring probe (11) is held by the method of non-contact to the measuring surface (28) in measuring process. COPYRIGHT: (C)2008,JPO&INPIT |
