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发明名称
OFEN
摘要
申请公布号
DE60033423(T2)
申请公布日期
2007.11.29
申请号
DE20006033423T
申请日期
2000.11.09
申请人
TOKYO ELECTRON LTD.
发明人
SAITO, YUKIMASA
分类号
F27D19/00;H01L21/31;C23C16/44;F27B5/04;F27B5/18;H01L21/00;H01L21/205;H01L21/22
主分类号
F27D19/00
代理机构
代理人
主权项
地址
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