SENSOR DEVICE WITH BACKSIDE CONTACTS

摘要

A sensor device for sensing air flow speed at the exterior of an aircraft, comprising a substrate having an upper side on which is mounted a diaphragm over an aperture or recess in the substrate, the diaphragm being thermally and electrically insulative, and mounting on its upper surface a heating element comprising a layer of resistive material, and wherein electrical connections to the heating element are buried in the diaphragm and/or the substrate, and provide electrical terminals at the lower side of the substrate. The heating element is exposed to the environment, but the remaining electrical parts of the device are not exposed. Portions of a conductive substrate may be cut or etched away to define a conductive pillar. Signals may be transmitted through the conductive pillar from one surface carrying the sensor element to the other surface carrying contact pads.