发明名称 BEHANDLUNGSMETHODE FÜR EINE DIAMANTOBERFLÄCHE UND ENTSPRECHENDE OBERFLÄCHE
摘要 <p>The invention relates to a treatment method of a diamond surface and to a corresponding diamond surface (5A).According to the method, ions are produced, each having at least three positive charges, and a beam of these ions is sent towards a diamond surface in order to make at least one zone of the surface conductive under the effect of said ions. Advantageously, conductive islands (6) are formed with a diameter smaller than 150 nm, then used preferably as one electron tank (diameter smaller than 10 nm) or as replenishment reservoirs for cold cathodes.Application to micro-electronics and to the production of cold cathodes.</p>
申请公布号 DE60127383(T2) 申请公布日期 2007.11.29
申请号 DE2001627383T 申请日期 2001.02.07
申请人 UNIVERSITE PIERRE ET MARIE CURIE 发明人 BRIAND, JEAN-PIERRE;BECHU, NICOLAS;GICQUEL, ALIX;ACHARD, JOCELYN
分类号 C30B29/04;H01L21/04;C30B33/04;H01J9/02;H01L21/265 主分类号 C30B29/04
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