发明名称 |
BEHANDLUNGSMETHODE FÜR EINE DIAMANTOBERFLÄCHE UND ENTSPRECHENDE OBERFLÄCHE |
摘要 |
<p>The invention relates to a treatment method of a diamond surface and to a corresponding diamond surface (5A).According to the method, ions are produced, each having at least three positive charges, and a beam of these ions is sent towards a diamond surface in order to make at least one zone of the surface conductive under the effect of said ions. Advantageously, conductive islands (6) are formed with a diameter smaller than 150 nm, then used preferably as one electron tank (diameter smaller than 10 nm) or as replenishment reservoirs for cold cathodes.Application to micro-electronics and to the production of cold cathodes.</p> |
申请公布号 |
DE60127383(T2) |
申请公布日期 |
2007.11.29 |
申请号 |
DE2001627383T |
申请日期 |
2001.02.07 |
申请人 |
UNIVERSITE PIERRE ET MARIE CURIE |
发明人 |
BRIAND, JEAN-PIERRE;BECHU, NICOLAS;GICQUEL, ALIX;ACHARD, JOCELYN |
分类号 |
C30B29/04;H01L21/04;C30B33/04;H01J9/02;H01L21/265 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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