| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet delivering head which has a high joining strength between constituting members, and excellent joining reliability and delivering directional property without any problem such as liquid leakage present between the constituting members, and to provide a method for manufacturing a liquid droplet delivering head and a liquid droplet delivering apparatus equipped with this liquid droplet delivering head. SOLUTION: In the liquid droplet delivering head equipped with a nozzle plate 2 with a plurality of nozzles 2a, a pressure generating chamber plate 6 which communicates with a plurality of the nozzles 2a and has pressure generating chambers 6a to store a liquid, a diaphragm 7 joined by an adhesive layer 9 to the pressure generating chamber plate 6, and a plurality of piezoelectric elements 8 which are joined at positions corresponding to a plurality of the pressure generating chambers 6a of a surface of the opposite side to the pressure generating chamber plate 6 of the diaphragm 7 and make the liquid delivered from the nozzles 2a by deforming the diaphragm 7 through applying a driving voltage, the diaphragm 7 has air escape holes 7b at regions that do not interfere with setting positions of the pressure generating chambers 6a. The air escape hole 7b makes the air between the diaphragm 7 and the adhesive layer 9 escape from a joining surface when the adhesive layer 9 is joined to the diaphragm 7. COPYRIGHT: (C)2008,JPO&INPIT
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