发明名称 |
Vacuum Pump |
摘要 |
A vacuum pumping arrangement is described for evacuating a load lock chamber. A booster pump comprises a molecular drag stage and a multi-stage centrifugal compressor mechanism. A backing pump comprises a multi-stage centrifugal compressor mechanism exhausting pumped fluid at atmospheric pressure. Such arrangements can reduce noise, size and vibration levels associated with conventional load lock pumping arrangements.
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申请公布号 |
US2007274822(A1) |
申请公布日期 |
2007.11.29 |
申请号 |
US20040581934 |
申请日期 |
2004.12.23 |
申请人 |
LIU MICHAEL C K;DOWDESWELL STEPHEN;SCHOFIELD NIGEL P |
发明人 |
LIU MICHAEL C.K.;DOWDESWELL STEPHEN;SCHOFIELD NIGEL P. |
分类号 |
F01D1/36;F04D17/12;F04D17/14;F04D17/16;F04D19/04;F04D27/02 |
主分类号 |
F01D1/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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