| 摘要 |
The present invention generally relates to the method of creating a reliable and cost efficient electrochemical capacitor electrode that has an improved lifetime, lower production cost and improved process performance. The invention generally includes treating or conditioning an electrode surface by depositing a ruthenium containing layer, or layers, having good adhesion to the substrate, low electrical resistivity (high conductivity) and has good resistance to chemical attack during the operation of electrochemical capacitor. One aspect of the invention discussed herein is a method of forming an electrode by depositing a ruthenium containing layer at relatively low temperatures, such as <180° C.
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