PRESSURE TRANSDUCER WITH INCREASED SENSITIVITY

摘要

Silicon piezoresistor low pressure transducers can not be made cost effectively with a full scale output large enough to interface to control electronics. The size of the diaphragm, and therefore the size of the die required to produce a sufficient span make the die cost prohibitive. Simultaneously forming transistors and composite diaphragms with a common series of semiconductor processing steps supplies sensing elements and amplifier elements in close proximity. The transistors can be configured to amplify voltages or currents produced by piezoresistors located on the composite diaphragm to produce an output large enough to interface with control electronics. As such, a smaller die results in a cost effective transducer.