| 摘要 |
<p>A surface examining device having detecting means for scanning the surface of an object under test with an examination beam and outputting a signal according to the intensity of the reflected beam from the surface. The device creates a two-dimensional image of the surface of the object under test according to the output signal of the detecting means, extracting defect candidate regions, determines defect candidate regions having a size larger than a predetermined value as defects, examines predetermined examination parts one by one in the two-dimensional image, and determines an examination part where the density of defect candidate regions having a size smaller than the predetermined value in the examination part is above a predetermined level as a defect part. Another surface examining device is used for judging whether or not there is any defect on the basis of the density value in a two-dimensional image corresponding to the surface of a tubular object under test. The image of a process portion to appear in the two-dimensional image is held as a reference image. The position of the image of the process portion in the axial direction and the number of images of the same process portion with respect to the circumferential direction are held. Parts to be excluded from the object of the defect judgment in the two-dimensional image is specified, and it is judged whether or not there is any defect on the basis of the density value of the pixel out of the specified part.</p> |
