Opto-pneumatic detector for non-dispersive infrared gas analyzer, has chamber with surface carrying coating of silicon oxide formed by plasma enhanced chemical vapor deposition, where coating is airtight against polar gas components

摘要

The detector has a detector chamber that comprises a metal such as aluminum, forming metal oxide at a surface in an interior of the chamber and contains a gas mixture with polar gas components. The surface carries a coating of silicon oxide formed through plasma enhanced chemical vapor deposition, where the coating is airtight against the polar gas components. The coating with a non-polar polymer surface is multi-layered, and the polar gas components are sulfur dioxide.