PROBE POSITION CONTROL SYSTEM AND METHOD

摘要

An apparatus and method for controlling a position of a probe are provided to enable more precise observation and manipulation of a work piece by calibrating a relative position of the work piece and the probe. An apparatus for controlling a position of a probe comprises a measuring member measuring interaction between the surface of a work piece and a region perpendicular to the surface, an oscillating member which oscillates the work piece and the probe at respective frequencies(f1,f2), a tracing member, a speed detecting member, and a calibrating member. The tracing member moves the probe relative to the work piece to detect a point at which the frequencies do not exist. The speed detecting member detects a relative speed based on the relative movement obtained by the tracing member. The calibrating member calibrates the relative position of the probe and the work piece using the speed.