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发明名称
SURFACE CLEANLINESS MEASUREMENT PROCEDURE AND TOOLS FOR MEASURING SURFACE CLEANLINESS
摘要
申请公布号
KR100779279(B1)
申请公布日期
2007.11.23
申请号
KR20010028366
申请日期
2001.05.23
申请人
发明人
分类号
G01B5/28;G01N1/04;B08B1/00;G01N1/02;G01N21/47;G01N21/94
主分类号
G01B5/28
代理机构
代理人
主权项
地址
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