发明名称 ELECTROSTATIC ABSORBER
摘要 PROBLEM TO BE SOLVED: To provide an electrostatic absorber which can be used without performing electric discharge even in various pressure environments. SOLUTION: This electrostatic absorber is provided with an electrostatic absorption electrode sheet 20, a substrate 11, boosting circuits 7 and 8, and electric wiring 5 and 6 electrically connecting an electrostatic absorption electrode sheet 20 and boosting circuits 7 and 8, and the boosting circuits 7 and 8 and electric wiring 5 and 6 are internally arranged in the substrate 11, and shielded from an external pressure atmosphere. Especially, it is desired that the substrate 11 is a case body or a sealing material. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007305938(A) 申请公布日期 2007.11.22
申请号 JP20060135609 申请日期 2006.05.15
申请人 TOMOEGAWA PAPER CO LTD 发明人 SANO SHUNICHI;KUROSAKI MASAARI;KAWASE RITSU;SHIMA TAKESHI
分类号 H01L21/683;H02N13/00 主分类号 H01L21/683
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