| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe microscope capable of accurately measuring the electron state density of the surface of a high resistance material or capable of performing the local measurement of the electron state density to visualize the distribution thereof, and a measuring method using it. SOLUTION: The probe microscope for measuring the surface potential of a sample has a contact charge mechanism [circuit (C)] for bringing a conductive probe into a contact with the surface of the sample and applying voltage to the sample in the contact state to induce charge on the surface of the sample and a potential measuring mechanism [circuit (K)] for measuring the surface potential of the sample due to the contact charge mechanism by bringing the conductive probe to a non-contact state with respect to the surface of the sample and is constituted so that the induction of charges due to the contact charge mechanism and the measurement of the surface potential due to the potential measuring mechanism are changed over to a time series while stepwise changing the applied voltage at the time of contact to measure the correlation of the applied voltage and the surface potential. COPYRIGHT: (C)2008,JPO&INPIT |
