| 摘要 |
PROBLEM TO BE SOLVED: To nondestructively measure the direction and amount of the inclination with respect to a reference axis of a guide axis center of a guide for machining of the taper having a circular arc shape guide surface with the radius of curvature larger than the diameter of a wire electrode. SOLUTION: An optical microscope is disposed to be positionable retractably in the axial direction on the guide shaft of the guide opposing to the guide, and a light source capable of adjusting light intensity is provided at the portion of the opposite side of the guide. Cross sectional shape measurement of the circular light is performed to a light control so as to visualize the illuminance of a circular light of the guide surface positioned at a first focal point position by adjusting the light intensity of the light which rises diffraction phenomena through the minimum diameter part of the guide hole, the measurement of the cross sectional shape is repeated by sequentially axially retreating the first focal point position relative to the guide surface and data is obtained, integrated and stored to analyze the calculation. COPYRIGHT: (C)2008,JPO&INPIT
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