| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of depositing various kinds of coating films such as an excellent defect-free corrosion-resistant film on an inner surface of a metallic structure having a hollow part such as a metallic pipe and a metallic container by a simple processing method. SOLUTION: In a method for depositing a coating film on an inner surface of a metallic structure, the metallic structure as a work has a hollow part surrounded by a metal, and has an opening part. After the hollow part of the metallic structure is in a hermetic state, and the inside thereof is evacuated, a raw gas is introduced therein. The pulse-like alternating voltage is applied to a metallic part constituting the metal structure to generate plasma in the hollow part of the metallic structure, and the coating film is deposited by a plasma CVD method. COPYRIGHT: (C)2008,JPO&INPIT
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