METHODS AND APPARATUS FOR PROCESSING A PULSED LASER BEAM TO CREATE APERTURES THROUGH MICROLENS ARRAYS, AND PRODUCTS PRODUCED THEREBY

摘要

A pulsed laser beam is used to create apertures in a layer on a back side of a substrate (192) that includes a microlens array (194) on a front side thereof. The pulsed laser beam is focused in a vacuum spatial filter (160). A profile of the pulsed laser beam that emerges from the vacuum spatial filter is converted to a top hat profile (120). The laser beam having the top hat profile is diffused (130). Finally, the pulsed laser beam having the top half profile that has been diffused is impinged through the microlens array on the front side of the substrate and onto the layer (196) on the back side of the substrate. Related apparatus for creating the apertures and microlens array products are also described.