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发明名称
Verfahren zum Dotieren eines festen Halbleiterkristalls
摘要
申请公布号
DE1150655(B)
申请公布日期
1963.06.27
申请号
DE1960S068360
申请日期
1960.05.05
申请人
SIEMENS & HALSKE AKTIENGESELLSCHAFT
发明人
RUMMEL DR.-ING. THEODOR
分类号
C23C8/36;H01L21/00
主分类号
C23C8/36
代理机构
代理人
主权项
地址
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