| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process for manufacturing a piezoelectric element in which uniformity of piezoelectric characteristics can be enhanced. <P>SOLUTION: The process for manufacturing a piezoelectric element comprises a step for drying sol of organic metal, and a step for degreasing it where a substrate 512 is heated by applying one side of the substrate entirely and tightly to a hot plate 100. More specifically, there are a method employing a substrate suction type hot plate equipped with a small hole 104, and a method for applying a load by means of a weight 101. Alternatively, the substrate 512 may be pressed tightly onto a metal plate 105 and mounted on the hot plate 100 with warp being corrected. Furthermore, it may be heated not through heat conduction but through radiation by placing a ceramic plate 102 on the hot plate 100 or using an electric heating wire. <P>COPYRIGHT: (C)2008,JPO&INPIT |
