| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coating installation more economic, capable of enabling the use for an inexpensive installation, and having a substrate carrier with less warpage. <P>SOLUTION: A substrate carrier 1 essentially includes a plate 2 made of glass ceramic. The glass ceramic material is not more expensive than a CFC material hitherto used and can be delivered in a short time. Further, the glass ceramic material has an elastic modulus in addition to a thermal resistance, a low density, and a low coefficient of expansion, and the temperature dependency of the elastic modulus is lower than that of the CFC material and therefore the warpage is less during the period of heating. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
