| 摘要 |
PROBLEM TO BE SOLVED: To prevent stain due to sticking of silicon wafers by draining treat water corresponding to change of thickness and outline dimension of the silicon wafer without fail. SOLUTION: This device comprises a traveling cart 33, an elevating plate 36 provided to the traveling cart 33 via an elevating cylinder 34 while elevating is allowed, and a clamp 38 provided to the plate 36 for clamping a basket B. The clamp 38 is supported between supporting plates 39 and 40 provided to the elevating plate 36 via a revolving shaft 41 while rocking is allowed, and an inclining cylinder 48 for making the clamp 38 rock from a horizontal position to a rocking inclining position is provided to the elevating plate 36. Meanwhile, a connection position changing means 50 can change a connection position of the inclining cylinder 48 and the clamp 38, by changing the connection position of the inclining cylinder 48 and the clamp 38, and inclination angle of the clamp 38 can be adjusted at the rocking inclining position when the inclining cylinder 48 is extended. COPYRIGHT: (C)2008,JPO&INPIT
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