| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection fixture having stable contact resistance regardless of the use number of times by reducing a contact resistant value between a contact and a connection electrode part. SOLUTION: The substrate inspection fixture for obtaining electric conductance between a substrate inspection device body and a plurality of substrate inspected points provided in a wiring pattern of an inspected substrate in order to inspect electric characteristics of the inspected substrate has: a contact group having ends achieving electric conductance on both the ends and having conductivity pressure welded on one of the substrate inspected points by one end; a contact holding body for holding the contact group; and a connection electrode body provided with the connection electrode part arranged oppositely to the other end of the contact of each of the contact group and connected to the substrate inspection device body. When connecting the other end of the contact to the connection electrode body, at least a part of a side peripheral face of the neighborhood of the respective other ends is an electric conductance state by being in contact with a part of the connection electrode part opposite to it. COPYRIGHT: (C)2008,JPO&INPIT
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