| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film which can be simply formed utilizing a solid hafnium and/or zirconium laminar compound easy to transport, and a method enabling a manufacture of such a hard film. SOLUTION: The hard film is characterized in that a scale shape body which contains hafnium and/or zirconium and oxygen and is amorphous clads the surface of a substrate. The manufacturing method of the hard film comprises the steps of forming on the substrate surface a precursor film for forming the hard film by dipping the substrate in an aqueous solution containing the laminar compound containing hafnia and/or zirconia and a carbonyl group, and an organic acid, and of treating the precursor film for forming the hard film with ultraviolet irradiation and/or heating. COPYRIGHT: (C)2008,JPO&INPIT
|
