Process to monitor laser beam in laser ablation process for the manufacture e.g. of a display with an amorphous silicon film on glass

摘要

In a laser ablation process for the manufacture e.g. of a display with an amorphous silicon film on glass, a substrate is removed by laser beam whose focus is monitored and corrected. The laser beam (2) passes through a mask (4) and lens (6) to impinge on a substrate (6). The focus is monitored by a unit by a using a red laser beam (9) and beam divider (13) that forms a monitoring beam (8) to a laser beam coupling unit (10) to the working laser unit (1) beam (2). The monitoring beam (8) is captured by a CCD camera.