VACUUM PAD AND SUBSTRATE SUCTION APPARATUS HAVING THEREOF

摘要

A vacuum pad and a substrate attaching apparatus having the same are provided to maintain a vacuum state of the vacuum pad not to provide any effects on vacuum attaching force of a neighboring vacuum pad even though leak occurs according as a tightly attached substrate is spaced, thereby stably attaching and fixing the substrate by the rest vacuum pads even though abnormality occurs in one of vacuum pads which are connected each other. An attaching pad(100) is contacted with a substrate and attaches and fixes the substrates. One end of an inhalation pipe(120) is connected to the attaching pad. Air sucked by the attaching pad passes through the inhalation pipe. A cut-off plate recovering unit(140) recovers a cut-off plate(130) by pulling the cut-off plate in a direction of the attaching pad. A vacuum hose line(150) is connected to the other end of the inhalation pipe and sucks air within the inhalation pipe.