| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deformable mirror apparatus in which off-axial aberrations, such as coma aberrations and astigmatism, as well as spherical aberrations, can be corrected. <P>SOLUTION: A predetermined intensity distribution pattern 2a is given to a deformable member 2, on which a reflecting film (mirror face) 3 is formed. With the formed pattern of the intensity distribution pattern 2a, a predetermined form which corrects the spherical aberrations is available as a mirror face form, when pressure is applied to the deformable member 2. Furthermore, a driving actuator for deforming the mirror face is so constituted as to generate pressure with the direction being variable. Thus, the mirror face is deformed giving a peak point which is dislocated from the mirror face center, and off-axis aberrations, as well as the spherical aberrations, can be corrected. <P>COPYRIGHT: (C)2008,JPO&INPIT |
