| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal sensor, of which the cover is formed out of a cooling coil line for preventing thermal shocks from being applied to the crystal sensor at depositing of organic material, and to provide a deposition device of an organic luminescent element that is equipped with it. SOLUTION: This deposition device includes a chamber; a stage mounted to one region in the chamber; a deposition vessel, arranged on the stage for storing a deposition material deposited to a substrate in its inside; and a heating device, located on the stage for heating the deposition vessel, with the crystal sensor arranged at a position where the deposition material is to be deposited. The crystal sensor includes the cover having the cooling coil line; a sensor rotating motor located in the inside of the cover; and a sensor part located in the inside of the cover and connected to the sensor-rotating motor. COPYRIGHT: (C)2008,JPO&INPIT
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