CORONA DISCHARGE IONIZER, FAN UNIT, AND CLEAN ROOM SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a corona discharge ionizer in which corona discharge operation is controlled to stop it at the time of stop of blowing air and abnormality and accumulation of ozone is eliminated. SOLUTION: The corona discharge ionizer is provided with an air volume sensor 49 arranged on an air passage and a CPU (corona discharge control part) 76 to stop discharge operation of discharge needles 50a-50d when the air volume on the air passage drops to a set value or less by the output signal of this air volume sensor 49. COPYRIGHT: (C)2008,JPO&INPIT