摘要 |
PROBLEM TO BE SOLVED: To provide a droplet applying apparatus which can efficiently coat a prescribed area (color defective area or the like) of a substrate with droplets and can exhibit the improved accuracy of the landing position of the droplets on the substrate. SOLUTION: The droplet applying apparatus has: a base 11 having a placing surface 11a on which the substrate 10 is placed; beam parts 41, 42 attached to the base 11 to be movable in the arrow A direction to the base 11; a plurality of droplet discharge parts 6 which are attached to the beam parts 41, 42, are movable in the arrow B direction and discharge the droplets to the substrate 10 placed on the placing surface 11a; and a control part 13 for controlling the movement or the stoppage of the plurality of the droplet discharge parts 6. The control part 13 controls the droplet discharge parts so that when one droplet discharge part 6 discharges the droplet and other droplet discharge parts 6 at least adjacent to the one droplet discharge part 6 move, a change in the acceleration during the speed variance of the other droplet discharge parts 6 is gentle. COPYRIGHT: (C)2008,JPO&INPIT
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