| 摘要 |
<p>A method for manufacturing ceramics includes a step of forming a ceramic film (20) on a substrate (10) by mixing a fine particle of a raw material species which becomes at least part of rawmaterials for ceramics with an active species, and feeding the mixed fine particle and active species to the substrate (10). A manufacture device includes a disposing section (40) which also serves as a heating section for a substrate (10), a raw material species feeding section (200) for feeding a fine particle of a raw material species, an active species feeding section (100) for feeding an active species, and a mixing section (300) for mixing the raw material species and the active species. <IMAGE></p> |
