摘要 |
<p>- Process for production of a lens of increased hydrogen content from synthetic quartz glass for an optical system of working wavelength less than 250 nm involving:provision of a synthetic quartz glass pre-product with a circular rim face and two opposite base faces where a partial surface of at least one of the base faces is curved and the pre-product has a first hydrogen content, treatment of the pre-product in a hydrogen containing atmosphere until the pre-product has a second hydrogen content higher than the first, and working of the partial surface after treatment in the hydrogen containing atmosphere to give the lens in its final form. An independent claim is included for a lens produced by the above process.</p> |