| 摘要 |
<p>Provided is an ion source which can generate an ion beam having a large width, a large beam current and excellent uniformity in beam current distribution in the width direction, and furthermore, can lengthen the life of a cathode. An ion source (2a) is provided with a plasma generating container (6) having an ion extracting port (8) extending in an X direction; a magnet (14) for generating a magnetic field (16) along the X direction in the container (6); indirectly heating cathodes (20), which are arranged on the both sides of the plasma generating container (6) in the X direction and are used for generating plasma (10) in the container (6) and for increasing/reducing density of the plasma (10) as a whole; and a plurality of filament cathodes (32), which are arranged in parallel along the X direction in the plasma generating container (6), and are used for generating the plasma (10) in the container (6) and for controlling density distribution of the plasma (10).</p> |
