| 摘要 |
Disclosed is an XY stage comprising a moving table, a first guide mechanism to guide the moving table in a predetermined direction, a moving body mounted to the moving table, a second guide mechanism to guide the moving body in a direction intersecting with a guiding direction of the first guide mechanism with respect to the moving table, a drive mechanism to drive the moving table in the guiding direction of the first guide mechanism, and a converting mechanism to convert motion of the moving table in the guiding direction of the first guide mechanism into motion of the moving body in a guiding direction of the second guide mechanism.
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