VIBRATION WAVE DETECTING METHOD AND DEVICE

摘要

A vibration wave detecting method and device capable of giving a given complex load. In the vibration wave detecting method, resonance beams (51a to 5nb) resonating with different specific frequencies are made to propagate vibration waves. The electrical outputs due to the resonances with the frequencies of the resonance beams (51a to 5nb) are detected by piezoelectric resistors (61a to 6nb) provided to the respective resonance beams (51a to 5nb). AC bias voltages having different phases for the different resonance beams (51a to 5nb)and a common frequency are applied to the piezoelectric resistors (61a to 6nb) of the resonance beams (51a to 5nb), and the outputs of the piezoelectric resistors (61a to 6nb) are combined. At least one of the AC bias voltages applied to the resonance beams (51a to 5nb) has an amplitude different from the others.