| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining method and a laser beam machining apparatus capable of miniaturizing the laser beam machining device without any large floor area, enhancing the machining efficiency, and performing the effective compound machining by jointly using other light source. <P>SOLUTION: Galvano-motors 7, 8 having a pair of conventional mirror lenses 7-1, 8-1 for scanning X-direction and Y-direction and an fθ lens 9 are arranged on the optical passage of laser beams, and an object 11 is arranged on a conveyor moving in the X-axis direction or on an X stage. The object is machined by laser beams by controlling the galvano-motors 7, 8 synchronously with the movement of the object 11. <P>COPYRIGHT: (C)2008,JPO&INPIT |
