摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a dielectric protective film for a ZnS-SiO<SB>2</SB>based optical information medium having excellent transmissivity and having reduced deterioration in reflectivity, and to obtain a sputtering target for forming the dielectric protective film. <P>SOLUTION: The dielectric protective film for a ZnS-SiO<SB>2</SB>based optical information recording medium or sputtering target has a composition comprising, by mol, 30 to 95% ZnS, 5 to 70% SiO<SB>2</SB>and Mn of 0.001≤Mn/(Zn+Mn+Si)≤0.2, and satisfying Mn<Si(atomic ratio). The dielectric protective film for a ZnS-SiO<SB>2</SB>based optical information recording medium or sputtering target further satisfies S/(Zn+Mn)<1. <P>COPYRIGHT: (C)2008,JPO&INPIT |