| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular acceleration sensor for detecting angular acceleration at a low cost. SOLUTION: In this angular acceleration sensor 1, first and second sensor parts 11 and 12 each comprising a piezoelectric acceleration sensor are disposed so that their respective z-axes are both vertical to the surface of a sensor substrate 13 and they point in directions opposite to each other. Further, in the acceleration sensor 1, an addition/subtraction part 15 applies addition and subtraction processes to an x-axis direction output and a y-axis direction output, respectively, of the sensor parts 11 and 12. Thus, angular acceleration can be detected by using the piezoelectric acceleration sensors. COPYRIGHT: (C)2008,JPO&INPIT
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