| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray detector 1 capable of improving resolution characteristics. SOLUTION: In the surface direction of the photoelectric conversion substrate 2 a plurality of pixel electrodes 7 are discretely arranged. On the pixel electrodes 7, the photoelectric conversion elements 8 are provided. On the photoelectric conversion substrate 2 the scintillator layer 31 for converting the radiation rays into visible rays is provided. The scintillator layer 31 is an assembly of a plurality of columnar crystal 32 consisting of columnar crystal 32 formed in the surface direction of the photoelectric conversion substrate 2, wherein the mean diameter the columnar crystal 32 is smaller than the gap between pixel electrodes 7. Therefore, the columnar crystal 32 never coincidentally covers over neighboring pixel electrodes 7, so that the resolution characteristics can be improved. COPYRIGHT: (C)2008,JPO&INPIT
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