| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid material coating machine which is capable of stably applying a liquid material. SOLUTION: The correction fluid application mechanism part 5 of the pattern correction device 1 is characterized by bringing the tip of the discharge nozzle 25a of the dispenser 25 close to the tip part of the coating needle 22 when the correction fluid 30 is supplied to adhere to the tip part of the coating needle 22 by discharging a predetermined amount of the correction fluid 30 from the discharge noddle 25a. Thus, a change of the properties can be suppressed to a minimum by volatilizing the component of the correction fluid 30. COPYRIGHT: (C)2008,JPO&INPIT
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