Optical environment effect correcting method for use during reproduction of sample, involves arranging optical units between object surface and image surface, and arranging Fourier-transformed pupil surface on image surface

摘要

The method involves arranging a set of optical units between an object surface and an image surface. A Fourier-transformed pupil surface is arranged on the image surface. A light used for reproduction of a sample is optically filtered by utilizing an optical proximity correction filter (OPCF). An OPC Filter function is selected under consideration of situation of interference diffraction orders caused by the sample in such a manner that variation line widths produced by the orders in an image plane is smaller than a projection lens without OPC filtering. Independent claims are also included for the following: (1) an optical filter for installation into a projection lens for reproduction of a sample into an image plane of the projection lens (2) a method for adjustment of reproduction characteristics of the projection lens.