METHOD AND SYSTEM FOR IMPROVING COUPLING BETWEEN A SURFACE WAVE PLASMA SOURCE AND A PLASMA SPACE

摘要

A method and system for improving the coupling between a surface wave plasma (SWP) source and a plasma space is described. The surface wave plasma source comprises an electromagnetic wave launcher, such as a slot antenna having a resonator plate, wherein at a plasma surface between the resonator plate and the plasma, a mode scrambler is utilized to improve coupling to the plasma.