摘要 |
PROBLEM TO BE SOLVED: To provide a rolling element coated with a solid lubricating sputter film whose lubricating property is not lowered even when stored for a long period under wet atmospheric environment. SOLUTION: The rolling element is coated with the solid lubricating film formed of sulfide in a sputtering method. Before the rolling element is coated with the solid lubricating film and then taken out in the atmosphere, the internal of a vacuum chamber is replaced with dry gas. The solid lubricating film is molybdenum disulfide or tungsten disulfide. The dry gas is at least one type of air, nitrogen or argon. The dry gas contains a water volume of 1 vol% or less. COPYRIGHT: (C)2008,JPO&INPIT |