| 摘要 |
An apparatus for vacuum coating, including a vacuum chamber in which there is arranged one or more magnetrons (2), each adapted to hold so-called targets in the form of at least one metal sheet (24) from where metal particles are to be transferred to the surface of a receiving item, the magnetrons (2) being designed with a channel system for supplying and discharging coolant, respectively, where the magnetrons (2) are designed as a preferably elongated body consisting of mutually movable and interacting parts, namely an outer part (14) having a longitudinal cavity and which outwards at opposite sides of the cavity has inwards facing holder members (12), and an inner part (18) disposed in the longitudinal cavity, and which outwards along opposing sides has edge parts (16) adapted to interact with the holder members for clamping the target (24), which in size is adapted to the magnetron (2), as each of the magnetrons includes means adapted to displace the inner part (18) in relation to the outer part (14). |
