CAPILLARY FLOW RESTRICTOR APPARATUS

摘要

A pump for use in operably evacuating a chamber in a vacuum degassing apparatus includes one or more pumping cavities that are in fluid communication with the chamber, and a continuous vent channel that has an outlet disposed in fluid communication with a respective one of the one or more pumping cavities. The vent channel is configured to provide dilution gas flow into the pumping cavity of the pump at a rate sufficient to prevent solvent condensation in the pumping cavity during operation of the pump in liquid degassing applications.