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发明名称
Method of mounting objects for chemical vapour deposition
摘要
申请公布号
AU2006202215(A1)
申请公布日期
2007.11.22
申请号
AU20060202215
申请日期
2006.05.25
申请人
COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION
发明人
AVI BENDAVID;EDWARD PRESTON;PHIL J MARTIN;MARK GROSS
分类号
C23C16/458;C23C16/26;C23C16/517
主分类号
C23C16/458
代理机构
代理人
主权项
地址
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