PLASMA DISPLAY PANEL, ITS MANUFACTURING METHOD, AND MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a plasma display panel in which electron emission characteristics of a metal oxidation film as a protection film is stabilized in the whole panel, and to provide its manufacturing method and a manufacturing device.

SOLUTION: Oxygen gas introducing means 217a-217c and H2O gas introducing means 218a-218c are respectively installed at three locations in the vicinity of the center line 221 of a substrate 103 and in the vicinity of end parts 222, 223 of the substrate 103 at nearby the exit of a vapor deposition chamber 202. Furthermore, oxygen gas introducing amount control means 317a-317c are respectively connected to the oxygen introducing means 217a-217c and H2O gas introducing amount control means 318a-318c are respectively connected to the H2O gas introducing means 218a-218c. Furthermore, gas partial pressure detection means 219a-219c at near the completion time of film-forming process and gas partial pressure detection means 320a-320c at near the starting time of the film-forming process are respectively installed at the discharge exit side 224 and the taking-in entrance side 225 of the vapor deposition chamber 202.

COPYRIGHT: (C)2008,JPO&INPIT