发明名称 METHOD AND APPARATUS FOR FORMING AN ELECTRICAL CONNECTION TO A SEMICONDUCTOR SUBSTRATE
摘要 A device ( 100 ) may use one or more conductive elements ( 112 ) to electrically couple a substrate ( 116 ) and a cap ( 114 ). In one embodiment, an acceleration sense element may be formed on the substrate ( 116 ), and the cap ( 114 ) may be used to provide hermetic protection to the acceleration sense element. In one embodiment, conductive elements ( 112 ) may be formed by dispensing conductive die attach material. Wire bonds (e.g. 322 ) bonded to bond pads (e.g. 332 ) on the substrate (e.g. 316 ) may be used to couple substrate ( 116 ), the conductive element pad ( 335 ), and the cap ( 114 ), to a desired predetermined potential.
申请公布号 US2007269926(A1) 申请公布日期 2007.11.22
申请号 US20060383659 申请日期 2006.05.16
申请人 SCHULTZ PETER S 发明人 SCHULTZ PETER S.
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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