| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a structure duplication method which accurately duplicates a structure even if a composition of matter to be formed has relatively high viscosity, and a structure duplication apparatus. <P>SOLUTION: The structure duplication method includes a process of providing a film manufacturing instrument having the surface and the back and having the reversal shape of the structure to be duplicated on the surface, a process of applying a reduced pressure to the surface of the film manufacturing instrument, a process of keeping the degree of the applied reduced pressure by hermetically closing the reversal shape, a process for filling the reversal shape with the composition of matter to be formed under sufficient liquid pressure and a process of fixing and transferring the target composition to the surface of a substrate. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
