POLYDENTATE beta-KETOIMINATE METAL COMPLEX

摘要

PROBLEM TO BE SOLVED: To provide a polydentateβ-ketoiminate metal complex to be used for making metal-containing film. SOLUTION: The polydentateβ-ketoimnate metal complex is, for example, a compound such as bis[2,2-dimethyl-5-(dimethylaminoethyl-imino)-3-hexanonato-N,O,N'] strontium or tris[2,2-dimethyl-5-(dimethylaminoethyl-imino)-3-hexanonato] yttrium. COPYRIGHT: (C)2008,JPO&INPIT