A METHOD OF DETERMINING THE FEASIBILITY OF A PROPOSED STRUCTURE ANALYSIS PROCESS
摘要
<p>A method of determining the feasibility of a proposed structure analysis process is disclosed. The process involved the electron beam excitation of x-rays from a multi- layered structure. The method comprises generating predicted x-ray data representing the x-ray excitation response of the multi-layered structure according to one or more sets of process conditions. The x-ray data are generated using structure data defining the structure and composition of the layers. The effects upon the x-ray data of changes to the structure data are then analysed in accordance with one or more predetermined feasibility criteria, so as to determine the feasibility of performing the proposed structure analysis process upon the multi-layered structure.</p>
申请公布号
WO2007132243(A1)
申请公布日期
2007.11.22
申请号
WO2007GB01803
申请日期
2007.05.16
申请人
OXFORD INSTRUMENTS ANALYTICAL LIMITED;STATHAM, PETER, JOHN;PENMAN, CHARLES